| Electronics materials | TOAGOSEI |
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"High purity TRIES" is an alkoxysilane which our company has industrialized for the first time in the world.
It is used as a material for SiO2 film in semiconductors and liquid crystals. Deposition can be accomplished at low temperatures due to its high reactivity. It also has superior embedding capability and good flattening ability.
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"High purity hexachlorodisilane (HCD)" is a deposition material for semiconductors which our company industrialized for the first time in the world.
It is greatly anticipated as a CVD (chemical vapor deposition) material for SiN film in the next generation of semiconductors. |
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"Functional spherical silica" is a completely new type of spherical silica which was created using our unique manufacturing technology.
It has high sphericity and a sharp particle size distribution. Our product line-ups include nano- to micro-silica particles. |
![]() Electron micrograph of HPS®-3500 |
| >Representative grades |
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Appearance | Average particle diameter |
| HPS®-3500 series | White fine powder | 3.5 |
| HPS®-1000 | White fine powder | 1.0 |
| HPS®-0500 | White fine powder | 0.5 |
| >Main properties |
| Categories | Units | Representative values |
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Compositions
  Silicon dioxide   Water   Aluminum   Iron   Uranium   Thorium |
% % ppm ppm ppb ppb |
>99.0 < 1.0 < 5 < 5 < 0.1 < 0.1 |
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Water soluble impurities (120br>
  Sodium ion
  Chloride ion |
ppm ppm |
<0.5 <0.5 |
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Extracted water properties (1204h)   pH   Electrical conductivity |
- cm |
5.5 <10 |
| >Examples of applications |
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| COPYRIGHT 2008 TOAGOSEI CO., LTD. |
